Integrated Bio- and Chemosensor Microsystems

According to IUPAC (International Union of Pure and Applied Chemistry) a Chemical Sensor is a device that transforms chemical information, ranging from the concentration of a specific sample component to total composition analysis, into an analytically useful signal.

Biosensors are usually considered a subset of chemical sensors making use of or detecting biologically relevant molecules or biological entities.

Integrated Bio- and Chemosensors means that the chemical sensor operation is based on a direct influence on an electric component (resistor, transistor, capacitor) integrated in silicon or another semiconductor material.

Finally the notion of a "System" implies that not only a single sensor or transducer are realized, but a system containing the sensor or transducer, associated analog and digital circuitry units and, e.g., interface units on the sensor side. The systems are realized prevalently in CMOS technology.

Chemical Sensor Types

CMOS-based Bio- and Chemosensor Microystems

Several transducer types, such as microcapacitors, microhotplates, cantilevers or thermopiles have been integrated with analog and digital circuitry units. Moreover, complex multitransducer systems have been developed. Applications include the detection of bio- and disease markers or hazardous chemo- and bio-agents.

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CMOS Multi-electrode Biosensors: DNA Detection

Smaller arrays of electrodes (500) have been realized along with potentiostats on the same chip for electrochemical sensing, such as potentiometry or cyclic voltammetry. Applications include, e.g., DNA analysis or the detection of hazardous chemo- and bio-agents.

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