CMOS-based Bio- and Chemosensor Microsystems

A variety of CMOS-based microtransducers and microsystems has been developed. The transducers include microcapacitors, microhotplates, cantilevers or thermopiles that have been monolithically integrated with the needed front-end and signal conditioning circuitry (analog and digital circuitry units). Several different transducers have been combined in arrays and these heterogeneous arrays showed a better  discrimination performance in comparison to homogeneous transducer arrays. Most fully integrated array systems (transducers, circuitry and interface) fit on a thumbnail (6mm by 7mm).

The main disadvantages of integrated or monolithic arrays or systems include the restriction in materials and the limited choice of fabrication processes and steps. On the other hand, integrated systems offer unprecedented advantages over hybrid or discrete arrays, especially with regard to signal quality, device performance, increased functionality, and available packaging solutions. These advantages, in our opinion, clearly outweigh the drawbacks and limitations.

Outlook

The progress in micro- and nanotechnology, microelectronics, and in data-processing
speed and capability will dramatically influence the development of bio- and chemical sensors and sensor systems in the near future: rather complex and versatile microsensor and microanalysis systems operable directly through standard interfaces from a laptop or palmtop by means of standard software are emerging. The end-user will be interested in reliable, user-friendly, and affordable sensor systems.

Publications

• Ricardo Gutierrez-Osuna and Andreas Hierlemann, "Adaptive Microsensor Systems", Annu. Rev. Anal. Chem.  Vol. 3, pp 255–76, 2010.
• Petra Kurzawski, Volker Schurig and Andreas Hierlemann, "Chiral Sensing Using a Complementary Metal−Oxide Semiconductor-Integrated Three-Transducer Microsensor System", Analytical Chemistry,  81 (22), pp. 9353–9364, 2009.
• P. Kurzawski, A. Bogdanski, V. Schurig, R. Wimmer, A. Hierlemann, "Opposite signs of capacitive microsensor signals upon exposure to the enantiomers of methyl propionates", Angewandte Chemie, International Edition, 2008, 47, 913-916.
• A. Hierlemann, R. Gutierrez-Osuna, "Higher-order Chemical Sensing", Chemical Reviews, 2008, 108, 563-613.

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Collaborations

University of Tübingen, ETH groups.

Contact

Prof. Andreas Hierlemann