Lectures

626-0001-00L: Microtechnology and Microelectronics

Lecturer: Hierlemann, A.

Students are introduced to the basics of semiconductors, microelectronics, microtechnology, and silicon process technology. They will get to know the fabrication of silicon-based microdevices and -systems by a sequence of defined batch processing steps as well as dedicated microfabrication processes.

Contents:

• Fundamentals of semiconductors
• Basics of microelectronics: transistor and diode.
• Silicon processing and fabrication steps
• Silicon crystal structure and manufacturing
• Thermal oxidation
• Doping via diffusion and ion implantation
• Photolithography
• Thin film deposition: dielectrics and metals
• Wet etching & bulk micromachining
• Dry etching & surface micromachining
• Microelectronics processing and fabrication sequence
• Packaging

636-0004-00L: Microsensors and Microsystems

Lecturer: Hierlemann, A.

Students are introduced to microsensor and microsystem technology. The students will get to know the different materials (silicon, glass, plastics) and the respective micromachining and fabrication techniques. They will become acquainted with the fundamentals of the different transducers (e.g., mechanical, thermal, magnetic, chemical, optical, biosensors) and the fundamentals of relevant circuitry units. Finally they will get to know strategies to integrate these components into microdevices and microsystems.

Contents:

• Brief introduction to semiconductors
• Silicon and glass micromachining
• Wafer bonding
  
• Plastic materials and their micromachining
  
• Fundamentals of different transducers
• Basic electronic circuits for sensors and microsystems
  
• Mechanical sensors
  
• Thermal sensors
  
• Magnetic sensors
• Optical devices
  
• Chemical and biosensors
• Microfluidics
• BioMEMS
  

626-0009-00L: Interdisciplinary Biotechnology

Lecturers: Panke, S. / Beerenwinkel, N. / Fussenegger, M. / Hierlemann, A. / Iber, D. / Paro, R. / Stelling, J.

Students are introduced to the basics of interdisciplinary biotechnology during a one-week block course. An overview of the knowledge needed for the bachelor in biotechnology is given with the idea to get all the students coming from different study directions to the same knowledge level.

151-0172-00L: Devices and Systems

Lecturers: Hierold, C. / Hierlemann, A.

The students are introduced to the fundamentals and physics of microelectronic devices as well as to microsystems (MEMS) in general. The classes will include basic electronic circuits for sensors, RF-MEMS, as well as a wide range of different microsensor and microsystems. The class will also introduce to the concepts of Nanosystems  with a focus on carbon nanotubes. The students will learn to apply principles, concepts and methods from a broad range of technical and scientific disciplines to devise innovative microtechnology products.

Contents:

• Semiconductor Fundamentals I: Bipolar
  
• Semiconductor Fundamentals II: MOS
• Fundamentals of Nanodevices
  
• Basic Circuits for Microsensors and Microsystems
• Transducer Fundamentals
• Surface Chemistry and Chemical Microsystems
• Microfluidics
• BioMEMS
• RF-MEMS (incl. interfaces) I
  
• RF-MEMS (incl. Interfaces) II
• Magnetic Devices and Sensors
• Optical Devices and Sensors
  
• Concepts for Nanosystems: Devices and Technology