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Physical Electronics Laboratory (PEL)

Member of D-BSSE

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The Physical Electronics Laboratory (PEL) was founded in 1988 by Prof. Henry Baltes and formed part of the Institute of Quantum Electronics (IQE) in the DepartmentĀ  of Physics (D-PHYS) of ETH Zurich.

The research at PEL has been targeted to developing CMOS-based integrated microtransducers (cantilevers, thermopiles, electrodes, infrared and ultrasound sensors) and complex microsystems in collaboration with IC manufacturers and microsystem users.

The research activities included device physics, the development of post-CMOS fabrication technology and packaging methods, as well as devising analog and digital circuitry units, i.e., signal conditioning and processing circuits, as needed for co-integration with the microtransducers. Several types of complex, integrated Micro Electro Mechanical Systems (MEMS) have been developed: CMOS-based physical, chemical and biosensor systems.

Last PEL CMOS Integrated Microsystems and Measurements

AFM
Bloodpress
CMOS Fully Integrated AFM (2004)
Thermal actuation of the cantilevers and piezoresistive position readout. Resolution is approx. 1 nm or 1 nN. (Chip size: 7mm by 10 mm)
Blood Pressure Graph (2007)
Blood pressure over time upon inhalation and exhalation as measured with a CMOS fully integrated capacitive pressure sensor.

In 2004 Prof. Henry Baltes was assigned to setting up the new Department Biosystems Science and Engineering (D-BSSE) of ETH Zurich in Basel, and Prof. Andreas Hierlemann became the head of PEL.

In 2006 Henry Baltes became professor emeritus.

In 2008 Andreas Hierlemann was appointed Full Professor at the theĀ  Department BSSE of ETH Zurich in Basel, and the Physical Electronics Laboratory ceased to exist in the D-PHYS. The people, the research and the equipment of PEL were transferred to the new laboratory, the Bio Engineering Laboratory (BEL), in Basel.

 

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© 2012 ETH Zurich | Imprint | Disclaimer | 18 December 2010
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