|
|||||||||||
|
|
The Physical Electronics Laboratory (PEL) was founded in 1988 by Prof. Henry Baltes and formed part of the Institute of Quantum Electronics (IQE) in the DepartmentĀ of Physics (D-PHYS) of ETH Zurich.
The research at PEL has been targeted to developing CMOS-based integrated microtransducers (cantilevers, thermopiles, electrodes, infrared and ultrasound sensors) and complex microsystems in collaboration with IC manufacturers and
microsystem users.
The research activities included device physics, the development of post-CMOS fabrication technology and packaging methods, as well as devising analog and digital circuitry units, i.e., signal conditioning and processing circuits, as needed for co-integration with the microtransducers. Several types of complex, integrated Micro Electro Mechanical Systems (MEMS) have been developed: CMOS-based physical, chemical and biosensor systems.
|
CMOS Fully Integrated AFM (2004) Thermal actuation of the cantilevers and piezoresistive position readout. Resolution is approx. 1 nm or 1 nN. (Chip size: 7mm by 10 mm) |
Blood Pressure Graph (2007) Blood pressure over time upon inhalation and exhalation as measured with a CMOS fully integrated capacitive pressure sensor. |
In 2004 Prof. Henry Baltes was assigned to setting up the new Department Biosystems Science and Engineering (D-BSSE) of ETH Zurich in Basel, and Prof. Andreas Hierlemann became the head of PEL.
In 2006 Henry Baltes became professor emeritus.
In 2008 Andreas Hierlemann was appointed Full Professor at the theĀ Department BSSE of ETH Zurich in Basel, and the Physical Electronics Laboratory ceased to exist in the D-PHYS. The people, the research and the equipment of PEL were transferred to the new laboratory, the Bio Engineering Laboratory (BEL), in Basel.
Wichtiger Hinweis:
Diese Website wird in älteren Versionen von Netscape ohne
graphische Elemente dargestellt. Die Funktionalität der
Website ist aber trotzdem gewährleistet. Wenn Sie diese
Website regelmässig benutzen, empfehlen wir Ihnen, auf
Ihrem Computer einen aktuellen Browser zu installieren. Weitere
Informationen finden Sie auf
folgender
Seite.
Important Note:
The content in this site is accessible to any browser or
Internet device, however, some graphics will display correctly
only in the newer versions of Netscape. To get the most out of
our site we suggest you upgrade to a newer browser.
More
information